“Designing and Setting up the Semiconductor Mass-Producing Fab Referring to Plasma Information-Based Virtual Metrology (PI-VM)”
Prof. Seolhye Park, Invited Speaker
Department of Energy Systems Engineering, Seoul National University (SNU), Seoul
“Identification of the Sheath Edge Using Laser-Induced Fluorescence”
Namjae Bae, Invited Speaker
Department of Energy Systems Engineering, Seoul National University (SNU), Seoul
at the 10th Asia-Pacific Conference on Plasma Physics (AAPPS-DPP 2026)
Date: 2026.10.11 (Sun)–2026.10.16 (Fri)
Location: Busan Port International Exhibition & Convention Center (BPEX), Busan, Republic of Korea