current_members_multi

Ph.D. Candidate

Kwon, Ji-Won

권지원

anakin1229@snu.ac.kr
Optical diagnostics-based virtual metrology and control for plasma processes

Ph.D. Candidate

Lee, Myeong-Geon

이명건

lmg1142@snu.ac.kr
Ion dynamics across magnetized sheath and  plasma material interaction for fusion device

Ph.D. Candidate

Park, Taejun

박태준

ptj9874@snu.ac.kr
Ion dynamics across RF sheath and feature-scale structures in CCP etcher

Ph.D. Candidate

Bae, Namjae

배남재

baenj2002@snu.ac.kr
Electronegative plasma sheath structure / Fault detection and classification based on PI-AI in PECVD

Ph.D. Candidate

Park, Jihoon

박지훈

wlgnstlsqkf@snu.ac.kr
Etching analysis & application based on plasma physics informed AI

Ph.D. Candidate

Lee, Ingyu

이인규

dusemong@snu.ac.kr
Development of an integrated real-time diagnostics and data-driven control system for process plasmas

MS Student

Lim, Jaemin

임재민

yjm8385@snu.ac.kr
Large-area ICP circuit modeling and Langmuir probe diagnostics for plasma monitoring

MS Student

Jin, Seoyoung

진서영

syjune26@snu.ac.kr
Plasma information-based AI(PI-AI) for semiconductor/display processes

MS Student

Choi, Gyujin

최규진

pokto5627@snu.ac.kr
Plasma kinetics modelling

MS Student

Lee, Yungwon

이윤권

ranran02@snu.ac.kr
Plasma information-based AI(PI-AI) for semiconductor/display processes

Intern

Kim, Junho

김준호

kimjunho2613@snu.ac.kr

Intern

Jang, Seongcheon

장성천

jsc1291@snu.ac.kr

Intern

Park, Junhyuk

박준혁

austin3265@snu.ac.kr

Intern

Lee, Yongho

이용호

r3ytv333@snu.ac.kr