Abstract
The generality of the non-Maxwellian electron energy distribution function (EEDF) is demonstrated by using optical emission spectroscopy (OES) and Langmuir probe measurements in inductively- and capacitively-coupled low-pressure argon plasmas to analyze the shape factor of the EEDF. To measure the shape factor of the EEDF, we propose a corona – equilibrium (CE) – based analysis model operating at low density, which uses the line intensity ratio of the Ar I to the Ar II emission lines. The Ar I line is chosen to represent the relatively low-energy state, and the Ar II line is chosen to represent the high-energy state. Thus, an analysis of the shape factor is equivalent to monitoring the variation in the high-energy electron fraction represented in the tail of the EEDF. Results show a depleted tail for the Maxwellian distribution in most of the low-density argon plasmas. The analysis reveals that the generation and the stepwise ionization of metastable argon atoms by inelastic collisions with high-energy (∼ 10 eV) electrons are dominant processes of argon plasma generation and cause serious high-energy electron loss in a low-density system compared to the loss in an ideal Maxwellian plasma. The existence of argon metastable states is inevitable; thus, the general shape of the electron energy distribution in low-pressure argon plasmas is non-Maxwellian.